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发明名称
摘要
申请公布号	JP3214092(B2)	申请公布日期	2001.10.02
申请号	JP19920249893	申请日期	1992.09.18
申请人		发明人
分类号	H01L21/318;H01L21/26;H01L21/31;(IPC1-7):H01L21/318	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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