发明名称 Fabrication of semiconductor Mach-Zehnder modulator
摘要 A semiconductor Mach-Zehnder modulator comprises a pair of phase modulator arm waveguides and a single driver for a push-pull modulation. A first electrode connected to p-type cladding layer of first modulator arm is maintained at a negative potential Vpi, a second electrode connected to n-type cladding layer of first modulator arm and p-type cladding layer of second modulator arm is driven by a drive voltage, and a third electrode connected to n-type cladding layer of second modulator arm is maintained at a ground potential. The drive voltage changes between Vpi, and Vpi/2 for push-pull modulation of both modulator arms.
申请公布号 US6281030(B1) 申请公布日期 2001.08.28
申请号 US20000580896 申请日期 2000.05.30
申请人 NEC CORPORATION 发明人 SHIMIZU JUNICHI
分类号 G02F1/015;G02F1/025;G02F1/225;(IPC1-7):H01L21/00 主分类号 G02F1/015
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