SUBSTRATE FOR X-RAY MASK, ITS MANUFACTURING METHOD, X- RAY MASK AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an X-ray mask which has high position precision after the mask is formed and can maintain the high position precision while the mask is used. SOLUTION: In an X-ray mask 1, an X-ray transmission film 12 has specified tensile stress as a whole and has film stress lower than specified at a specified region of a surface layer of the X-ray transmission film 12. The X-ray transmission film 12 is composed of the same crystalline material as a whole, and has practically uniform stress in the specified region of the surface layer without stress change in the film thickness direction.