发明名称 |
Multiple-shaft power transmission apparatus and wafer transport arm link |
摘要 |
The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner magnetic rings via the partition. The inner magnetic rings comprises a plurality of magnets disposed around a first yoke member. The outer magnetic rings comprise a plurality of magnets disposed around a second yoke member. One or both of the first and second yoke members can be disassembled.
|
申请公布号 |
US2001012483(A1) |
申请公布日期 |
2001.08.09 |
申请号 |
US20010772866 |
申请日期 |
2001.01.31 |
申请人 |
BKS LAB. LTD. |
发明人 |
KONO HIROKO;KUMAGAI HIROMI |
分类号 |
B25J9/10;B25J9/12;H01L21/677;(IPC1-7):B66C23/00;B65G49/07 |
主分类号 |
B25J9/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|