| 摘要 |
<p>A liquid concentration sensing method and device for measuring the concentrations of at least two components contained in a liquid by applying at least two beams of light of different wavelength bands the center wavelength of which are 1.4 νm to 2.05 νm and measuring the intensity of each light beam transmitted through a liquid. The concentrations of components contained in a chemical used in a semiconductor manufacturing process or in a liquid crystal substrate manufacturing process are measured with high precision and high reliability in line and in real time by means of a simple structure.</p> |
