发明名称 METHOD AND SYSTEM FOR TESTING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a system and a method for producing a test pattern, enabling defects in a mounting stage detectable previously during manufacturing test, etc. SOLUTION: With respect to the terminal signal of a semiconductor device, a logic analyzer acquires signal waveform data for a period including defect- existing time, standing from the time in the past earlier that the time of defect occurrence. The test pattern producing system converts the waveform data into a test pattern and outputs it to an automatic test device for testing the semiconductor device as a tested device. Data for the defect-existing time is changed into normal data to prepare an expected value pattern relative to an output signal of the semiconductor device. It is checked as to whether the setting of a required input signal corresponding to the output signal exists in the signal waveform data. If it does not exist, a test pattern is produced for setting the input signal into the semiconductor device. When the defect is reproduced by the test device, the test pattern is used for mass production test.
申请公布号 JP2001183430(A) 申请公布日期 2001.07.06
申请号 JP19990367492 申请日期 1999.12.24
申请人 NEC CORP 发明人 NISHIKAWA KATSUMI;SHIBATA KAZUO
分类号 G01R31/28;G01R31/3183;G01R31/3193;G06F11/22;G11C29/10;G11C29/56 主分类号 G01R31/28
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