| 摘要 |
PROBLEM TO BE SOLVED: To greatly increase track density and, furthermore, surface recording density while maintaining recording/reproduction properties equal to or better than those of the prior art. SOLUTION: The present invention is characterized in that a non-magnetic substrate 11, target members 12, and magnetic plates 21 are placed in parallel in a film-forming apparatus 10, a high frequency voltage is applied to the target members, the opposite polarities are generated alternately at equal intervals on the surfaces of the magnetic plates, and plasma is produced near the target members to deposit a thin film on the non-magnetic substrate by sputtering. COPYRIGHT: (C)2006,JPO&NCIPI
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