| 摘要 |
The disclosure relates to a CVD (10) system including a filter (270) disposed in a passageway (268) formed in the feedthrough (40) between the inlet (42) and the outlet (44). The filter (270) preferably comprises a cylindrical hollow member, such as a tube, having a porosity sized to purify the precursor gas flow through the feedthrough prior to the gases entering the gas manifold (46). Additionally, the porosity reduces the entry of non-vaporized liquid precursor materials. The filter material can be stainless steel or other materials that are non-reactive with the precursor gases, such as titanium, nickel, Hastalloy TM , aluminum, aluminum oxide, barium strontium titanate, aluminum nitride, silicon carbide or combinations thereof. A preferable porosity through the filter material can be 100 mu m (microns) or less, preferably about 5 to about 20 mu m and most preferably about 10 mu m. The porosity can be varied depending on the precursor components, desired flow rate and pressure drop, useful life of the filter, and cleanliness of the system. <IMAGE> |
