| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that desired stopping position accuracy cannot be obtained if an ultrasonic motor is driven using a driving signal with intermittent burst waveform parts. SOLUTION: This motor 10 is provided with an oscillator 11, a relative- movement member 21, and a drive 30 inching the oscillator 11 with a driving signal 40 with intermittent burst waveform parts 40a and controlling at least the frequency of the burst waveform part 40a of the driving signal 40 based on the driving results of the oscillator 11 by the burst waveform part. It is thus possible to adjust a feed amount by one burst waveform part 40a in continuous manner, thereby improving stopping position accuracy. |
