| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute object preparing method and device, capable of manufacturing minute objects by coupling together two members in the correct positional relationship such as a nano-tube probe, while enlarging image photographing takes place in an electron microscope device. SOLUTION: This minute object preparing method and device for use in an electron microscope device is configured, and first members are fixed to the apices of a mounting table 30 in the form of a regular polygon, an array carrying a plurality of second members is fixed to the forefront of a mounting table 60, the mounting table 30 in regular polygon is rotated for a specified angle so that the first members at its apices are positioned mating with the second members, and these members are moved to the coupling position under control and coupled together, so that minute objects are intermittently prepared continuously. Accordingly, the minute object can be manufactured by coupling together two members, such as nano-tube probe in the correct positional relationship, while enlarged photographing takes place in the electron microscope device. It is possible to continuously manufacture a plurality of minute-objects effectively without breaking vacuum.
|
