POLISING BOARD HAVING LIQUID SUPPLY MECHANISM

摘要

PROBLEM TO BE SOLVED: To facilitate attachment/detachment of a work and replacing and cleaning of polishing cloth by blowing out a slurry and a rinse liquid to an upper surface from an under surface of the polishing cloth through a polishing plate by a liquid supply system arranged on a polishing table. SOLUTION: A large number of cloth water passing small holes 1a are arranged in polishing cloth 1. A large number of plate water passing small holes 2a for communicating with a large number of cloth water passing small holes 1a are bored in polishing plate 2. A liquid storage clearance part 3 for communicating with a lower part of the plate water passing small holes 2a is arranged between the polishing plate 2 and a polishing table 4. A slurry and rinse liquid supply system 5 is arranged on the polishing table 4, and respective liquids are blown out to an upper surface of the polishing cloth 1 when necessary, thereby easily perform work such as attachment of a work and repapering and cleaning of the polishing cloth 1 by eliminating a nozzle in the vicinity of the polishing cloth 1.