ABSORBER ARRANGING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To easily arrange a photon absorber even in a portion closely installed with equipment surrounding a vacuum chamber, without limiting the arrangement of peripheral devices. SOLUTION: A through-hole 18 communicating with the inside and the outside of a vacuum chamber 14 by extending in the inward radial direction from a suitable position on the outer circumferential surface is opened in a joint flange 15 of the vacuum chamber 14, and a cylindrical absorber-fixing port 16 is welded so that an inner path 17 of itself is communicated with the through- hole 18. A photon absorber 13 is installed in the absorber fixing port 16 so as to project into the vacuum chamber 14 through the inner path 17 and the through-hole 18.