| 摘要 |
PROBLEM TO BE SOLVED: To provide a superconducting quantum interference element which can make measurement with higher accuracy, because no magnetic field coupling occurs in the other area than a detecting coil and can measure the magnetic field interlinked with the detecting coil, by preventing the interlinking of external magnetic fields with a washer coil used for transmitting signals transmitted from an external control system to a superconducting loop through a feedback- modulation coil by forming the washer coil on a ground plane. SOLUTION: A ground plane layer 7 is formed on the other part than a detecting coil 3, particularly, on or under a washer coil 2 which is magnetically coupled with a feedback-modulation coil 4 to which signals are transmitted from an external control system with an interlayer insulating layer in between. Consequently, the coupling of an external magnetic field in the other area than the detecting coil 3 can be prevented and a magnetic field interlinked with the coil 3 can be measured with high accuracy. This is specially effective when the detecting area of the detecting coil 3 is small and is suitable for high spatial resolution measurement.
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