| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treating device capable of executing surface treatment to the object for surface treatment over a large area without causing the increase of the device scale. SOLUTION: This device is provided with a ball joint 40 allowing a holding stand 20 and a plasma torch 30 to be supported to a chamber 10 in such a manner that the holding stand 20 and the plasma torch 30 are made relatively rotatable around a primary axis and a secondary axis present extensionally at least in the orthogonal direction with eath other, a male screw member 82 screwed onto the plasma torch 30 via a female screw member 50, an actuator 80 for secondary rotation rotating this male screw member 82 and an actuator 70 for primary rotation rotating the male screw member 82 via an oscillating plate 73, a revolving plate 72 and an actuator 80 for secondary rotation.
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