| 摘要 |
The present invention is a polishing machine, comprising a rotatable metallic platen whose surface is covered by the plural number of polishing pad, on the position of the surface of said metallic platen corresponding to the jointing lines of said polishing pads, the grooves are engraved, and the filling material which is different from the material composing the platen is inserted into said grooves. The desirable substance to be inserted into said grooves is stainless steel, synthetic resin or ceramics. <IMAGE> |
