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发明名称
摘要
申请公布号
JP2980315(B1)
申请公布日期
1999.11.22
申请号
JP19980269846
申请日期
1998.09.24
申请人
NIPPON DENKI AISHII MAIKON SHISUTEMU KK
发明人
TAMYA MASAYUKI
分类号
H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L21/822
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