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发明名称
SUBSTRATE PROCESSOR
摘要
申请公布号
JPH11307434(A)
申请公布日期
1999.11.05
申请号
JP19980115494
申请日期
1998.04.24
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
OGASAWARA MITSUO;TANIGUCHI TAKESHI;YANAGISAWA NOBUO
分类号
G02F1/1333;B05B13/02;G03F7/42;G09F9/30;H01L21/027;(IPC1-7):H01L21/027;G02F1/133
主分类号
G02F1/1333
代理机构
代理人
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