INSPECTION DEVICE USING ELECTRON BEAM,申请号JP19980075176-传众专利搜索

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发明名称	INSPECTION DEVICE USING ELECTRON BEAM
摘要
申请公布号	JPH11273612(A)	申请公布日期	1999.10.08
申请号	JP19980075176	申请日期	1998.03.24
申请人	NIKON CORP	发明人	WATANABE YOICHI;HAMASHIMA MUNEKI
分类号	H01J37/22;H01J37/29;(IPC1-7):H01J37/29	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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