MANUFACTURE OF WIRING BOARD

摘要

PROBLEM TO BE SOLVED: To fabricate a capacitor of the high capacitance having stable electric characteristics, by forming conductor layers of a specified pattern in layers on one face of an insulating substrate, flattening the surface of the multilayer conductor layer, forming dielectric layers made of a substance of a high permittivity in layers on specified electrodes constituted of the conductor layers, and then forming electrode layers made of electrode material in layers on the multilayer dielectric layer. SOLUTION: On the surface of a glass ceramic substrate 11A in the most upper layer, insulator layers 14 made of polyimide resin material or epoxy resin material and formed in layers. The conductor layers 17 of a specified pattern made of desired electrode material such as gold are formed as an external electrode on the multilayer insulator layer. Between adjacent conductor layers 12A-12F located at specified places on the substrates 11A-11D and the insulator layer 14, conduction paths 15A-15G are formed. Between specified electrodes of some conductor layers 12A, 12B, a resistance substance is printed. On the conductor layer 12F formed on the substrate 11D in the lowest layer, conductor layers 18 made of electrode material such as gold are formed in layers as an external electrode through a barrier metal layer. Then, on the conductor layer 12A, a capacitor 19 is formed by a thin-film formation process, and the conductor layer 17 formed on the insulator layer 14 and a conduction path 15H are connected.