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发明名称
FILM THICKNESS MEASURING APPARATUS USING SEMICONDUCTOR MANUFACTURING PROCESS
摘要
申请公布号
KR100203748(B1)
申请公布日期
1999.06.15
申请号
KR19950067535
申请日期
1995.12.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SONG, KON-CHOL;KIM, SONG-KWON;JONG, HYON-TAEK;LEE, SANG-GIL
分类号
G01B11/06;H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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