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发明名称
摘要
申请公布号	JP2874367(B2)	申请公布日期	1999.03.24
申请号	JP19910059966	申请日期	1991.03.25
申请人	HITACHI SEISAKUSHO KK	发明人	ITO YOICHI;KANAI SABURO
分类号	H01L21/683;H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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