| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor wafer storage container which can easily prevent a storage error that a semiconductor wafer makes inclination and is abnormally stored and which can prevent the lowering of work efficiency. SOLUTION: The storage container is formed into a box form, and plural groove parts 7 which mutually face one another are arranged and formed on the inner sides of a pair of side board parts which face each other. Both end parts in the diametrical directions of the semiconductor wafers 10 are engaged between a pair of groove parts 7 which face each other so as to be stored. In such a case, the pitch interval P of the plural groove parts 7 which are arranged and formed is set larger than a size, where the both end parts of the diameter directions of the semiconductor wafers 10 can be stored between the groove part 7c adjacent to the other groove part 7b which face one groove part 7a and the other groove part 7a.</p> |
