| 摘要 |
<p>PROBLEM TO BE SOLVED: To apply a substrate storage case for storing a substrate such as reticle to other devices irrespective of the top and bottom of the case. SOLUTION: On the bottom of a frame 5, hold members 2 are provided for holding a substrate 1. A preload plate 12 attached to an upper lid 6 via compression springs 4 is provided with preload hold members 3 so that they are symmetrical with respect to the hold members 2 with the substrate between them. The parts 2a and 3a of the hold members 2 and the preload hold members 3, respectively, where they contact the substrate 1 are formed so as to taper. Cams 8 for moving the preload plate 12 upward according as an opening operation of a front lid 7 is attached to walls 5C and 5D. Thus, even if the case is inverted so that its bottom is above the top, the substrate 1 is surely held by the hold members 2 and the preload hold member 3, and it is released from the hold by opening the front lid 7.</p> |
