| 发明名称 |
METHOD FOR MANUFACTURING OF PIN HOLES ON SURFACE |
| 摘要 |
FIELD: microelectronics, in particular, generation of pin holes for manufacturing vacuum integral circuits. SUBSTANCE: method involves oxidation and etching by means of application of gas discharge in crossed electric and magnetic fields with magnetic inductance level in range of 0.005-0.07 T in pure oxygen under pressure in range of 1-0.05 Pa. Simultaneously method involves monitoring of process in order to prevent surface burning. EFFECT: improved emission characteristics, simplified design of manufacturing process. 4 cl, 3 dwg
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| 申请公布号 |
RU2121193(C1) |
申请公布日期 |
1998.10.27 |
| 申请号 |
RU19960100789 |
申请日期 |
1996.01.11 |
| 申请人 |
IKI PRI SARATOVSKOM GOSUDARSTVENNOM UNIVERSITETE I;KOLOSOV VJACHESLAV VIKTOROVICH;GAVRILOV MIKHAIL VIKTOROVICH;SARATOVSKAJA GOSUDARSTVENNAJA AKADEMIJA PRAVA;GAVRILOV MIKHAIL VIKTOROVICH;SARATOVSKAJA G AKADEMIJA PRAVA |
发明人 |
KOLOSOV V.V.;GAVRILOV M.V. |
| 分类号 |
H01J9/02;H01J1/30;H01J19/24;(IPC1-7):H01J1/30 |
主分类号 |
H01J9/02 |
| 代理机构 |
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