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发明名称
CLEANING APPARATUS
摘要
申请公布号
JPH10189516(A)
申请公布日期
1998.07.21
申请号
JP19960347969
申请日期
1996.12.26
申请人
SUMITOMO HEAVY IND LTD;NEC CORP
发明人
MUNAKATA AKIHIKO;HOSAKA HISAO;AOKI HIDEMITSU
分类号
B08B7/00;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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