| 摘要 |
PROBLEM TO BE SOLVED: To obtain an excimer laser device which can obtain a uniform pulsed light output by controlling the power supply voltage from a laser discharge power source and halogen gas supply by giving the highest priority to the suppression of the fluctuation of each output energy. SOLUTION: Laser pulse oscillation is performed in a laser chamber 2 by exciting a laser gas by discharge and the emitted pulsed light is narrowed in band by means of a band narrowing unit 6. The band-narrowed pulsed light returns to the chamber 2 and is outputted as an oscillated laser beam L through a partially transmissive mirror 7 after the pulsed light is amplified in the chamber 2. The laser beam L is sampled through beam splitters 8 and 13 and made incident to a light receiving element 14. A CPU 15 detects the energy Ei of the laser beam L based on the output of the light receiving element 14 and controls a laser power source circuit 16 and gas supplying device 17. Therefore, an excimer laser device which can obtain a uniform pulsed light output by controlling the power supply voltage Vi by means of the laser power source circuit 16 and the laser gas supply to the chamber 2 by means of the gas supplying device 17 can be obtained. |
