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发明名称
HANDOTAISOCHINOJITSUSOHOHO
摘要
申请公布号
JP2654191(B2)
申请公布日期
1997.09.17
申请号
JP19890197682
申请日期
1989.07.28
申请人
NITSUTO DENKO KK
发明人
TANAKA MUNEKAZU;SUGIMOTO MASAKAZU
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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