| 摘要 |
<p>PROBLEM TO BE SOLVED: To plan a production schedule of semiconductor devices efficiently. SOLUTION: A memory means 3 stores group names and allowance of shifts for each of a plurality kinds of semiconductor devices. An identical group name is provided when a single wafer processing is performed under the same conditions in the production process except the batch processing and masking step. Upon receiving a production schedule data determining the timing for starting production of a plurality of kinds of semiconductor devices for a plurality of days based on a scheduled date of delivery and standard machining days, a production schedule alteration means 5 makes a decision whether predetermined number of semiconductor devices for batch processing, belonging to the same group name, are present within the allowance of the shift. If predetermined number of semiconductor devices are present, production schedule is altered to produce the semiconductor devices belonging to the same group are produced on the same day.</p> |
