CONFORMAL TITANIUM-BASED FILMS AND METHOD FOR THEIR PREPARATION,申请号EP19950938751-传众专利搜索

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发明名称	CONFORMAL TITANIUM-BASED FILMS AND METHOD FOR THEIR PREPARATION
摘要
申请公布号	EP0784713(A1)	申请公布日期	1997.07.23
申请号	EP19950938751	申请日期	1995.10.10
申请人	GELEST, INC.;THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK	发明人	ARKLES, BARRY C.;KALOYEROS, ALAIN E.
分类号	C23C16/14;C23C16/34;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;(IPC1-7):C23C16/00	主分类号	C23C16/14
代理机构		代理人
主权项
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