发明名称 Jet vapor deposition of organic molecule guest-inorganic host thin films
摘要 A host-guest jet vapor deposition system uses sonic jets and moving substrates to produce host-guest films in which complex organic molecules are trapped in hard, inorganic hosts. The system is capable of film fabrication at high rate and room temperature. Guest molecule concentrations are large and film quality is excellent. Films made in accordance with the present invention have applications in optics and electronics.
申请公布号 US5650197(A) 申请公布日期 1997.07.22
申请号 US19950538967 申请日期 1995.10.05
申请人 JET PROCESS CORPORATION 发明人 HALPERN, BRET
分类号 C23C14/06;C23C14/22;(IPC1-7):C23C16/00;C23C14/00 主分类号 C23C14/06
代理机构 代理人
主权项
地址