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发明名称
ALIGNING EQUIPMENT USING CCD CAMERA IN EXPOSURE EQUIPMENT
摘要
申请公布号
JPH09186079(A)
申请公布日期
1997.07.15
申请号
JP19960254590
申请日期
1996.09.26
申请人
SANSEI KOKU SANGYO KK
发明人
KIN SOUTETSU
分类号
G03F7/20;G03F9/00;H01L21/027;H01L27/146;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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