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发明名称
Ultrasonic motor having high drive efficiency
摘要
申请公布号
EP0382563(B1)
申请公布日期
1997.06.18
申请号
EP19900301410
申请日期
1990.02.09
申请人
NIKON CORPORATION
发明人
TAKAGI, TADAO;SAYA, DAISUKE;NEMOTO, SHIGEHISA
分类号
H01L41/09;H02N2/12;H02N2/16;(IPC1-7):H01L41/09
主分类号
H01L41/09
代理机构
代理人
主权项
地址
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