| 摘要 |
The sensor for detecting flame or smoke consists of an air-cavity(22) formed by etching on silicon substrate(22), an insulation layer(23) formed on the substrate, an opto-electrode formed on a certain place of the insulation layer, a glass substrate(28) with a bottom layer having a protective film(27) on the opto-electrode, an anode electrode formed on the bottom of the glass layer, and an epoxy electrode lead(30) connecting to the anode electrode and formed on the upper layer of the glass substrate. The glass substrate includes a transparency characteristic of the UV ray. The upper layer of the glass substrate is adhered face-to-face between the air cavity.
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