| 摘要 |
<p>PROBLEM TO BE SOLVED: To measure the destruction of DUT, the precursor of the destruction and the like accurately at a high speed. SOLUTION: In this signal switching device, a plurality of switching circuits are provided in parallel at input terminals 11 and 12 and output terminals 14a, 14b.... Respective switching circuits 2a, 2b,... are constituted so as to have the following parts. A first switch circuit 3 inputs and outputs a minute current signal accompanying a guard. The input side of a current limiting circuit 5 is connected to a stress signal terminal 13. A second switch circuit 41 has the constitution, wherein the input side is connected to the output side of the current limiting circuit 5 and the output side of an output terminal is connected to the output side of the first switch 3. For lines 6 having the guards, each one end is connected to the output side of the first switch circuit 3 and the second switch circuit 41, and the other ends are connected to the output terminals 14a, 14b,....</p> |
