| 摘要 |
PROBLEM TO BE SOLVED: To inspect airtightness conveniently and reliably by determining the airtightness based on the flow rate of gas being fed into an exhaust duct at a moment of time when the detected pressure in the exhaust duct reaches a set level. SOLUTION: Pressurized air is fed into an exhaust duct 1 under a state where the inlet 11 and outlet 12 of duct 1 are closed hermetically. Consequently, pressure in the duct 1 increases and detected along with the flow rate of pressurized air. When the detected pressure in the duct 1 reaches a set level, a decision is made whether the flow rate of pressurized air is higher than a set value. A decision is made that the leakage from the duct 1 exceeds a specified level and the airtightness of duct 1 is not acceptable if the flow rate of pressurized air is higher than the set value, otherwise the airtiqhtness of duct 1 is acceptable. |
