PLASMA CVD METHOD AND APPARATUS THEREFOR,申请号JP19950012618-传众专利搜索

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发明名称	PLASMA CVD METHOD AND APPARATUS THEREFOR
摘要
申请公布号	JPH08199363(A)	申请公布日期	1996.08.06
申请号	JP19950012618	申请日期	1995.01.30
申请人	KOKUSAI ELECTRIC CO LTD	发明人	TERASAKI MASATO
分类号	H05H1/46;C23C16/50;H01L21/205;(IPC1-7):C23C16/50	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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