Verfahren und Vorrichtung zur quantitativen Bestimmung von Chemikalien zur Behandlung von Halbleitern.

摘要

The present invention relates to a quantitative determination method of a medicament for processing semiconductor by near-infrared spectrometry at 800 - 1400 nm and an apparatus which is adapted to the practice of said method. According to the present invention, concentration of an aqueous solution of the medicament can be determined without drawbacks of the prior methods.