发明名称 Nonvolatile semiconductor memory device and manufacturing method therefor
摘要 A drain diffusion layer acting as a drain of both of a memory transistor and a selection transistor, and a source diffusion layer acting as a source of both of the memory transistor and the selection transistor are formed in a semiconductor substrate. A floating gate having a convex upper surface is formed on a tunnel insulating film in the vicinity of the drain diffusion layer. A common gate acting both as a control gate of the memory transistor and as a gate of the selection transistor is formed such that its one end is located over the floating gate and the other end is located in the vicinity of the source diffusion layer.
申请公布号 US5461249(A) 申请公布日期 1995.10.24
申请号 US19940280376 申请日期 1994.07.26
申请人 ROHM CO., LTD. 发明人 OZAWA, TAKANORI
分类号 H01L21/28;H01L21/336;H01L29/423;H01L29/788;(IPC1-7):H01L29/788 主分类号 H01L21/28
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