System zur automatischen Inspektion periodischer Muster.,申请号DE19873750189-传众专利搜索

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发明名称	System zur automatischen Inspektion periodischer Muster.
摘要
申请公布号	DE3750189(D1)	申请公布日期	1994.08.18
申请号	DE19873750189	申请日期	1987.03.13
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	BATCHELDER, JOHN SAMUEL, TARRYTOWN NEW YORK 10591, US;BONNER, RAYMOND EUGENE, YORKTOWN HEIGHTS NEW YORK 10598, US;DOM, BYRON EDWARD, NORTH SALEM NEW YORK 10560, US;JAFFE, ROBERT STEVEN, SHENOROCK NEW YORK 10587, US
分类号	H01L21/66;G01B11/24;G01B11/25;G01N21/88;G01N21/956;G06T1/00;G06T7/00;(IPC1-7):G06F15/70	主分类号	H01L21/66
代理机构		代理人
主权项
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