发明名称 MANUFACTURE OF SEMICONDUCTOR CHIP
摘要 <p>PURPOSE:To enable a semiconductor chip to be lessened in manufacturing cost and enhanced in yield when non-defective semiconductor chips are manufactured from a wafer. CONSTITUTION:A wafer sheet B is pasted on the rear of a wafer A, the wafer A is cut into separate semiconductor chips, then the wafer sheet B is biaxially oriented, wax 2a and 2b are applied onto the semiconductor chips 1a defective in shape and the defective semiconductor chips out of the semiconductor chips 1, and the semiconductor chips 1 are dipped into chemical liquid to separate the wafer sheet B and then screened.</p>
申请公布号 JPH065668(A) 申请公布日期 1994.01.14
申请号 JP19920165775 申请日期 1992.06.24
申请人 ROHM CO LTD 发明人 NAKATSUKA SATORU;OKI TETSUO
分类号 H01L21/66;H01L21/301;H01L21/78;(IPC1-7):H01L21/66 主分类号 H01L21/66
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