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发明名称
VACUUM PROCESSING SYSTEM
摘要
申请公布号
EP0555891(A3)
申请公布日期
1993.09.15
申请号
EP19930106893
申请日期
1986.10.17
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
DAVIS, CECIL;WOOLDRIDGE, TIMOTHY A.;CARTER, DUANE E.;SPENCER, JOHN E.;MATTHEWS, ROBERT;HILDENBRAND, RANDALL C.
分类号
H01L21/677;B25J15/08;B65G1/00;B65G1/02;B65G1/04;B65G1/07;B65G49/00;B65G49/07;C23C14/56;C23C16/44;C23F4/00;H01L21/00;H01L21/67;H01L21/68;H01L21/687;(IPC1-7):H01L21/00
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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