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发明名称
FINE PATTERN TREATMENT METHOD UTILIZING REACTION BY ELECTRON
摘要
申请公布号
JPH05206018(A)
申请公布日期
1993.08.13
申请号
JP19920013178
申请日期
1992.01.28
申请人
SONY CORP
发明人
UGAJIN RYUICHI
分类号
H01L21/205;H01L21/027
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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