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发明名称
PLASMA CONTROL APPARATUS
摘要
申请公布号
JPH05180966(A)
申请公布日期
1993.07.23
申请号
JP19920018366
申请日期
1992.01.08
申请人
HITACHI LTD
发明人
ABE MITSUJI;TAKEUCHI KAZUHIRO
分类号
G21B1/11;G21B1/00
主分类号
G21B1/11
代理机构
代理人
主权项
地址
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