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发明名称
GROWING METHOD FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH05182907(A)
申请公布日期
1993.07.23
申请号
JP19910358633
申请日期
1991.12.28
申请人
SONY CORP
发明人
ISHIKAWA HIDETO
分类号
H01L21/20;H01L21/205;H01L21/22
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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