| 摘要 |
<p>PURPOSE:To detect a measuring object assuredly even of surface property of the object might change anyhow. CONSTITUTION:A reflection type sensor device is a device that a light projection part 19 and a light receiving part 21 are arranged to a main body 13 of a sensor at predetermined angle, and light from the light projection part 19 is reflected by a semi-conductor wafer 11 to be received by the light receiving part 21. At least one of the light projection part 19 and the light receiving part 21 is attached to the main body 13 of the sensor, freely to rotate, as well as is driven to rotate by an actuator 24 which is actuated corresponding to signal from the light receiving part 21.</p> |
