发明名称 METHOD AND DEVICE FOR RESHARPENING SAWS ESPECIALLY USED FOR MAKING SEMICONDUCTOR WAFERS
摘要 A device and method for resharpening the cutting edge of saws used in particular in the centerhole sawing of semiconductor bars. It contains a sharpening system which consists of at least one elongate sharpening stone facing the cutting edge with its end face, is movable laterally relative to the saw blade and has at the end face two working surfaces which are located opposite one another and, during sharpening, can be brought into contact laterally with the cutting-edge surface facing them. The device affords trouble-free operation and permits sharpening actions during the sawing operations.
申请公布号 US5144938(A) 申请公布日期 1992.09.08
申请号 US19900616783 申请日期 1990.11.20
申请人 ELEKTRONIK-GRUNDSTOFFE MBH 发明人 SEEBURGER, HELMUT;LEHFELD, PETER;KURTZE, WOLF-RUEDIGER
分类号 B24B53/00;B24D99/00;B28D5/00;B28D5/02;H01L21/304 主分类号 B24B53/00
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