MICROMOTION MECHANISM OF PROBE OF TUNNEL MICROSCOPE

摘要

PURPOSE:To provide a micromotion mechanism for a compact tunnel microscope wherein the generation of strain is less. CONSTITUTION:A supporting stage 10 has a three-dimensional coarse moving mechanism. Expanding-type piezoelectric bodies 11XY and 12XY are intersected at a right angle to each other. One end part of each piezoelectric body is attached to the supporting stage 10. The other end part is attached to a supporting stage 13. Electrodes 17A, 17B, 18A and 18B (17B and 18B are not shown in the figure) are provided for the piezoelectric bodies 11XY and 12XY. Shared-type piezoelectric bodies 14Z and 15Z are attached to the supporting stage 13. Electrodes are provided on both surfaces of each piezoelectric bodies. A probe 16 is attached to the shared-type piezoelectric part 15Z.