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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH04171930(A)
申请公布日期
1992.06.19
申请号
JP19900301375
申请日期
1990.11.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
KANEOKA TATSUNORI
分类号
H01L21/302;H01L21/306;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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