| 摘要 |
PURPOSE:To achieve high quality, high band high recording density by forming an amorphous alloy film which is shown by a composition expression of Fea Bb Nc and whose composition range is 0<b<=2 and 0<c<=22 and then by performing its heat treatment for discharging N and crystallizing it. CONSTITUTION:An amorphous alloy film which is expressed by a composition expression Fea Bb Nc (a, b, and c show atom% each and B is at least one type of Zr, Hf, Ti, Nb, Ta, V, Mo, and W) and whose composition range is 0<b<=20 and 0<<=22 (excluding b<=7.5 and c<=5) is formed. It is subjected to heat treatment, N is discharged, and crystallization is made, thus obtaining a soft magnetic property thin film. It is desirable that N is discharged to obtain the soft magnetic property thin film where the composition is within the composition range of an amorphous alloy film and c/d is 1.0-2.1. This soft magnetic property thin film shows a further improved soft magnetic property (for example, retention force Hc, anisotropic magnetic field Hk, etc.) and a tendency where Hk is reduced as the c/b value is reduced, thus obtaining a soft magnetic property thin film where the anisotropic magnetic field Hk is restricted by controlling the amount of discharge N. |
