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发明名称
CONVEYING ROBOT IN VACUUM
摘要
申请公布号
JPH0465853(A)
申请公布日期
1992.03.02
申请号
JP19900179745
申请日期
1990.07.06
申请人
SEIKO INSTR INC
发明人
KOYANO SHINJI
分类号
B65G49/00;B25J21/00;H01L21/677;H01L21/68
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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